WVCP6000 Biyaha Uumiga Cryopump Nidaamyada Qaboojiyaha Cryogenic
Sharaxaada Alaabta
Guangzhou Xieyi Automation Technology Co., Ltd., oo la aasaasay 2011, waa shirkad gaar ah oo tiknoolajiyadeed oo sare oo ku taal Koonfurta Shiinaha oo ku hawlan horumarinta cilmi-baarista, wax-soo-saarka, la-tashiga farsamada iyo adeegga loogu talagalay heerkulka aadka u hooseeya ee matoorada uumiga biyaha iyo kuwa kale. Qalabka heerkulka aadka u hooseeya.
XIEYI WVCP Cryochillers waa habab qaboojiyeyaal loop ah oo xiran oo bixiya 550 watts ~ 6,000 watts oo qaboojin ah.Cryochillers-yadan waxaa loo isticmaali karaa in lagu qabto uumiga biyaha iyo walxaha kale ee la qaadi karo iyadoo lagu qaboojinayo meel qabow sida gariiradda Meissner (cryocoil).WVCP cryochillers ayaa sidoo kale loo isticmaalaa in lagu qaboojiyo walxaha sida chucks electrostatic ee loo isticmaalo farsamaynta wafer-ga yar.
Qiyaasta Farsamada
| Qaabka | WVCP6000-SH | WVCP6000-DH |
| Awoodda qaboojinta ugu badan (W) | 6000 | 6000 |
| Aragtida xawaaraha ugu badan ee bamgareynta dabinka qabow ee tuubada (L/S) | 588000 | 588000 |
| Aragtida xawaaraha ugu badan ee dabin qabow saxan (L/S) | 882000 | 882000 |
| Faakuumka ugu dambeeya (mbar) | 2*10-8 | 2*10-8 |
| Wakhtiga qaboojiyaha ugu badnaan aagga dabin qaboojinta (daqiiqo) | <5 | <5 |
| Heerkul baraf ah oo kala duwan oo la hagaajin karo (℃) | -20 ~ 30 | -20 ~ 30 |
| Habka xakamaynta cadaadiska | Dareemaha dhijitaalka ah+Shirkada dareemaha | Dareemaha dhijitaalka ah+Shirkada dareemaha |
| Soo celinta degdega ah ee cadaadiska dheelitirka shaqada (QRBP) | Haa | Haa |
| Shaqada caddaynta xannibista saliidda (OBP) | Haa | Haa |
| Xakamaynta fog ee 4G | Haa | Haa |
| Guryaha warbaahinta qabow | Pro-deegaanka | Pro-deegaanka |
| Baaxadda ugu badan ee dabinka qabow ee tuubada (㎡) | 4 | 4 |
| Baaxadda ugu badan ee dabin qabow oo saxan ah (㎡) | 6 | 6 |
| Tilmaamida dabin qabow (㎡) | φ16mm*80m | / |
| Faahfaahinta dabin qabow oo laba jibaaran (㎡) | / | 2*φ16mm*40m |
| Interface gaaska | 12.7 isgoysyada naxaasta alxanka leh (Standard) | 12.7 isgoysyada naxaasta alxanka leh (Standard) |
| ParkerCPI/VCR (ikhtiyaar) | ParkerCPI/VCR (ikhtiyaar) | |
| Qulqulka biyaha qaboojinta (L/min at 24 ℃) | 48 | 48 |
| Qaboojinta heerkulka alaarmiga biyaha (℃) | 38 | 38 |
| munaaradda qaboojinta | Haa | Haa |
| Xidhiidhiyaha biyaha qaboojinta (L/S) | G1” | G1” |
| Awoodda culeyska ugu badan (kW) | 25.3 | 25.3 |
| Compressor magaca awooda (HP) | 20 | 20 |
| Korontada (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
| 200-230V AC 3P (L) | 200-230V AC 3P (L) | |
| Cabbirka (MM) | 935(L)*873(D)*1809(H) | 1235(L)*873(D)*1809(H) |
| Miisaanka (KG) | 655 | 655 |
